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S. Goryainov

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Downloads 95 (736,406)

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 26 Feb 2025
Mikhail Mikhailenko, Alexei Chernyshev, Alexei Pestov, Nikolay Chkhalo, Anastasia N. Orlova, Maria Zorina, Niranjan Kumar, S. Goryainov and Vladimir Volodin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 58 (1,006,630)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 27 Feb 2025
Mikhail Mikhailenko, Alexei Chernyshev, Alexei Pestov, Nikolay Chkhalo, Anastasia N. Orlova, Maria Zorina, Niranjan Kumar, S. Goryainov and Vladimir Volodin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 37 (1,296,409)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness