affiliation not provided to SSRN
ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness
GeOx thin films, Thermal evaporation, Short-range order, Tauc model, Optical gap
Laser procccesing, Gold-induced crystallization, Silicon suboxide, Phase transformation, thin films, Laser crystallization
germanium films, ultrashort infrared laser crystallization, non-thermal effects, Raman spectroscopy