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Maria Zorina

affiliation not provided to SSRN

SCHOLARLY PAPERS

2

DOWNLOADS

102

TOTAL CITATIONS

0

Scholarly Papers (2)

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 26 Feb 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 58 (1,006,630)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness

Microstructure of the Subsurface Layer Formed in Monocrystalline Silicon During Etching with Xe+ Ions Investigation

Number of pages: 32 Posted: 27 Feb 2025
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 37 (1,296,409)

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ion-beam etching, monocrystalline silicon, quasiamorphous Si, roughness

2.

Effect of 100 keV Helium Ions on Be/Si/Al Multilayer X-ray Mirrors

Number of pages: 17 Posted: 27 Jan 2026
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 7 (1,566,597)

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Multilayer mirrors, X-Ray Spectroscopy, radiation resistance, ion irradiation, helium ions