Che-Men Chu

National Central University

Jhongli, Taoyuan 32001, Taiwan.

Jhongli, 32001

Taiwan

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Effects of hydrogen and carbon co-implantation on boron activation in germanium at low temperatures

Number of pages: 25 Posted: 09 Apr 2026

Ruey-Dar Chang, Bo-Wen Lee, Jui-Chang Lin, Che-Men Chu and Wei-Yen Woon

Chang Gung University, Chang Gung University, Chang Gung University, National Central University and National Central University

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