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Tae-Eon Park

Korea Institute of Science and Technology (KIST)

14 gil 5 Hwarangno, Seongbuk-gu

Seoul, 02792

Korea, Republic of (South Korea)

  • Korea Institute of Science and Technology (KIST)

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Scholarly Papers (1)

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Enhanced Dielectric and Energy Storage Performances of Hf0.6zr0.4o2 Thin Films by Al Doping

Downloads 97 (704,534)

Enhanced Dielectric and Energy Storage Performances of Hf0.6zr0.4o2 Thin Films by Al Doping

Number of pages: 26 Posted: 10 Nov 2022
Seung Won Lee, Min Ji Jeong, Youkyoung Oh, Hyo-Bae Kim, Tae-Eon Park and Ji-hoon Ahn
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST) and Hanyang University
Downloads 72 (871,518)

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HfZrO2 thin films, crystal structure modulation, anti-ferroelectricity, DRAM capacitor, Energy storage device

Enhanced Dielectric and Energy Storage Performances of Hf0.6zr0.4o2 Thin Films by Al Doping

Number of pages: 26 Posted: 27 Oct 2022
Seung Won Lee, Min Ji Jeong, Youkyoung Oh, Hyo-Bae Kim, Tae-Eon Park and Ji-hoon Ahn
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Korea Institute of Science and Technology (KIST) and Hanyang University
Downloads 25 (1,430,393)

Abstract:

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HfZrO2 thin films, crystal structure modulation, atomic layer deposition, anti-ferroelectricity, DRAM capacitor, energy storage device