Tsukuba, 305-0047
Japan
National Institute for Materials Science
Atomic layer deposition (ALD), Ferroelectric HfxZr1−xO2 thin film, Ferroelectricity, Metal-ferroelectric-metal (MFM) capacitor, Memory device, Interface reaction layer, Endurance property, Hard X-ray photoelectron spectroscopy (HAXPES)
electrochromic devices, Tungsten trioxides, Molybdenum trioxides, Nanoparticle composites, Violet light shutter
metal oxide semiconductor, thin-film transistors, Low-frequency noise, oxygen pressure, charge transport mechanism