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Yue Wang

University of Science and Technology Beijing

30 Xueyuan Road, Haidian District

beijing, 100083

China

  • University of Science and Technology Beijing

SCHOLARLY PAPERS

2

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122

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Scholarly Papers (2)

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1.

Stability of Tantalum Nitride Film Influenced by Oxygen Substitution of Nitrogen

Number of pages: 20 Posted: 15 Nov 2022
Yue Wang, Guanzhong Qiao, Yuting Zheng, Yuhang Yin, Jinlong Liu, Liangxian Chen, Puqing Jiang, Junjun Wei and Chengming Li
University of Science and Technology Beijing, University of Science and Technology Beijing, University of Science and Technology Beijing, affiliation not provided to SSRN, University of Science and Technology Beijing, University of Science and Technology Beijing, Huazhong University of Science and Technology, University of Science and Technology Beijing and University of Science and Technology Beijing
Downloads 71 (875,328)

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tantalum nitride, Magnetron sputtering, stability, TCR, thermal conductivity

2.

Influence of Room-Temperature Oxidation on the Stability of Reactively Sputtered Tan Thin Films for Sheet Resistors

Number of pages: 19 Posted: 28 Sep 2023
Mingzhen Zhang, Yue Wang, Shangzhi Song, Ruiqiang Guo, Wenbin Zhang, Chengming Li, Junjun Wei, Ronggui Yang and Puqing Jiang
Huazhong University of Science and Technology, University of Science and Technology Beijing, Huazhong University of Science and Technology, Shandong Institute of Advanced Technology - Thermal Science Research Center, Michigan Technological University, University of Science and Technology Beijing, University of Science and Technology Beijing, Huazhong University of Science and Technology - School of Energy and Power Engineering and Huazhong University of Science and Technology
Downloads 51 (1,052,702)

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Tantalum nitride, stability, temperature coefficient of resistance, thermal conductivity, Oxidation