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Wenbin Zhang

Michigan Technological University

Houghton, MI 49931

United States

SCHOLARLY PAPERS

1

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Scholarly Papers (1)

1.

Influence of Room-Temperature Oxidation on the Stability of Reactively Sputtered Tan Thin Films for Sheet Resistors

Number of pages: 19 Posted: 28 Sep 2023
Huazhong University of Science and Technology, University of Science and Technology Beijing, Huazhong University of Science and Technology, Shandong Institute of Advanced Technology - Thermal Science Research Center, Michigan Technological University, University of Science and Technology Beijing, University of Science and Technology Beijing, Huazhong University of Science and Technology - School of Energy and Power Engineering and Huazhong University of Science and Technology
Downloads 51 (1,052,702)

Abstract:

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Tantalum nitride, stability, temperature coefficient of resistance, thermal conductivity, Oxidation