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Carl-Thomas Piller

University of Tartu

Ülikooli 18

Tartu 50090, 50090

Estonia

  • University of Tartu

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Scholarly Papers (1)

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Atomic Layer Deposition of Α-Al2o3 from Trimethylaluminum and H2o: Effect of Process Parameters and Plasma Excitation on Structure Development

Number of pages: 19 Posted: 22 Dec 2022
Lauri Aarik, Carl-Thomas Piller, Jüri Raud, Rasmus Talviste, Indrek Jögi and Jaan Aarik
University of Tartu, University of Tartu, University of Tartu, University of Tartu, University of Tartu and University of Tartu
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Abstract:

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A1. Crystal structure, A1. Surface processes, A3. Atomic layer epitaxy, A3. Plasma-assisted deposition, B1. Aluminum oxide, B2. Dielectric materials