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Yongjie Zhang

Southern University of Science and Technology

No 1088, xueyuan Rd.

Xili, Nanshan District

Shenzhen, 518055

China

  • Southern University of Science and Technology

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Scholarly Papers (1)

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Mechanism Study of Thermal Etching of Gan by Atmospheric Argon Inductively Coupled Plasma

Number of pages: 20 Posted: 22 Jan 2023
Linfeng Zhang, Yongjie Zhang, Bing Wu and Hui Deng
Southern University of Science and Technology, Southern University of Science and Technology, Southern University of Science and Technology and Southern University of Science and Technology
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Abstract:

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Thermal etching, GaN, Inductively coupled plasma, Damage relief