Decheng Zhang

South China Normal University

483 Wushan Str.

Tianhe District

Guangzhou, 510631, 510642

China

SCHOLARLY PAPERS

1

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60

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0

Scholarly Papers (1)

1.

High Quality Stealth Dicing of Sapphire with Picosecond Bessel Beam by Controlling the Polarization Direction

Number of pages: 13 Posted: 25 Feb 2023
South China Normal University, affiliation not provided to SSRN, affiliation not provided to SSRN, South China Normal University - National Center for International Research on Green Optoelectronics, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 60 (780,849)

Abstract:

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Sapphire, Bessel beam, picosecond laser, polarization, roughness