Decheng Zhang

South China Normal University

483 Wushan Str.

Tianhe District

Guangzhou, 510631, 510642

China

  • South China Normal University

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High Quality Stealth Dicing of Sapphire with Picosecond Bessel Beam by Controlling the Polarization Direction

Number of pages: 13 Posted: 25 Feb 2023
Decheng Zhang, Jianjun Yang, Jiaxuan Liu, Lingling Shui, Xinjian Pan and Yuqian Li
South China Normal University, affiliation not provided to SSRN, affiliation not provided to SSRN, South China Normal University - National Center for International Research on Green Optoelectronics, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Sapphire, Bessel beam, picosecond laser, polarization, roughness