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Jiaxuan Liu
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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High Quality Stealth Dicing of Sapphire with Picosecond Bessel Beam by Controlling the Polarization Direction
Number of pages: 13
Posted: 25 Feb 2023
Decheng Zhang
,
Jianjun Yang
, Jiaxuan Liu,
Lingling Shui
,
Xinjian Pan
and
Yuqian Li
South China Normal University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, South China Normal University - National Center for International Research on Green Optoelectronics,
affiliation not provided to SSRN
and
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Abstract:
Sapphire, Bessel beam, picosecond laser, polarization, roughness
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