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Huaping Song

Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory

Dongguan, 523808

China

SCHOLARLY PAPERS

1

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96

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Scholarly Papers (1)

The Etching Behaviour of Dislocations in N-Doped Sic Substrate

Number of pages: 11 Posted: 06 Mar 2023
Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, Guangdong University of Technology, Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, affiliation not provided to SSRN and Guangdong University of Technology
Downloads 75 (848,302)

Abstract:

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Keywords: A1. defects, A1. Characterization, A1. Etching, A1. Optical microscopy, B2. Semiconducting silicon compounds.

The Etching Behaviour of Dislocations in N-Doped Sic Substrate

Number of pages: 11 Posted: 06 Mar 2023
Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, Guangdong University of Technology, Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, Chinese Academy of Sciences (CAS) - Songshan Lake Materials Laboratory, affiliation not provided to SSRN and Guangdong University of Technology
Downloads 21 (1,486,852)

Abstract:

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Keywords: A1. defects, A1. Characterization, A1. Etching, A1. Optical microscopy, B2. Semiconducting silicon compounds.