affiliation not provided to SSRN
multicomponent nitride coatings, reactive DC magnetron sputtering, target poisoning, hysteresis behavior, hardness, indentation modulus
multicomponent nitride coatings, reactive DC magnetron sputtering, target poisoning, hysteresis behavior, Hardness, indentation modulus
HiTUS, (ZrTaNbVHfTi)N, structure, mechanical properties, cytotoxicity