multicomponent nitride coatings, reactive DC magnetron sputtering, target poisoning, hysteresis behavior, hardness, indentation modulus
transition metal borides, Thin films, magnetron sputtering, twinning, Density functional theory, nanostructure, Hardness, planar defects, Mechanical properties, stoichiometry
multicomponent nitride coatings, reactive DC magnetron sputtering, target poisoning, hysteresis behavior, Hardness, indentation modulus