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Hyunki Ko

affiliation not provided to SSRN

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Scholarly Papers (1)

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Polymer-Based Semiconductor Wafer Cleaning: The Roles of Organic Acid, Processing Solvent, and Polymer Hydrophobicity

Number of pages: 23 Posted: 28 Mar 2023
Seong Hoon Yu, Hayoung Jeon, Hyunki Ko, Ji Hoon Cha, Soyeon Jeon, Mingyu Jae, Geon-Hee Nam, Kyoungsuk Kim, Yeongjin Gil, Kuntack Lee and Dae Sung Chung
affiliation not provided to SSRN, Samsung Electronics Co., Ltd., affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Samsung Electronics Co., Ltd. and affiliation not provided to SSRN
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wafer cleaning, polymers, nanoparticles, organic acids, processing solvent, flakes