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Kuntack Lee

Samsung Electronics Co., Ltd.

SCHOLARLY PAPERS

2

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141

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Scholarly Papers (2)

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1.

Polymer-Based Semiconductor Wafer Cleaning: The Roles of Organic Acid, Processing Solvent, and Polymer Hydrophobicity

Number of pages: 23 Posted: 28 Mar 2023
Seong Hoon Yu, Hayoung Jeon, Hyunki Ko, Ji Hoon Cha, Soyeon Jeon, Mingyu Jae, Geon-Hee Nam, Kyoungsuk Kim, Yeongjin Gil, Kuntack Lee and Dae Sung Chung
affiliation not provided to SSRN, Samsung Electronics Co., Ltd., affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Samsung Electronics Co., Ltd. and affiliation not provided to SSRN
Downloads 138 (534,155)

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wafer cleaning, polymers, nanoparticles, organic acids, processing solvent, flakes

2.

Composition-Dependent Formation Kinetics and Etching Passivation of ODTS SAMs on Si1-xGex Surfaces

Number of pages: 32 Posted: 25 Jun 2026
Geon-Hee Nam, Jaejun Kim, Jaejik Baek, Hayoung Jeon, Kuntack Lee and Dae Sung Chung
affiliation not provided to SSRN, Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd., Samsung Electronics Co., Ltd. and affiliation not provided to SSRN
Downloads 3

Abstract:

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SAM kinetics, Langmuir isotherm, Selective etching, Etching passivation