affiliation not provided to SSRN
Passivating contact, Film blistering, PECVD, In-situ phosphorus doping
Ferroelectric, ZnMgO, Atomic layer deposition, remnant polarization
Ferroelectric random access memory, atomic layer deposition, Hf0.5Zr0.5O2 ferroelectric thin film, 12-inch Si wafer, electrical uniformity
thin film sensor, SnO2/ZnO composite film, Atomic layer deposition, hydrogen sensing property