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Boris Le Drogoff

affiliation not provided to SSRN

SCHOLARLY PAPERS

2

DOWNLOADS

36

TOTAL CITATIONS

0

Scholarly Papers (2)

1.

Exploring Structural and Mechanical Properties of Sinx Thin Films on Sio2 Substrate Via Molecular Dynamics Simulations

Number of pages: 21 Posted: 31 Jul 2024
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 22 (1,436,435)

Abstract:

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Thin film deposition and growth, Molecular dynamics method, Silicon nitride, Mechanical Properties

2.

Toward Crack-Free Thick Silicon Nitride through Thermal Stress Compensation

Number of pages: 15 Posted: 26 Jun 2026
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 14

Abstract:

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Chemical Vapour Deposition, Intrinsic Mechanical Stress, Thermal Mismatch, Thick Silicon Nitride