27 Shanda Nanlu
South Rd.
Jinan, SD 250100
China
Shandong University
three dimensional geometric measurement, double precision, laser triangulation, error compensation, point cloud data registration
Femtosecond laser, Chemical etching, Array structure, optical properties
femtosecond laser, Monocrystalline silicon, Laser-induced periodic surface structure (LIPSS), Silicon grains, Formation mechanism