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Dun Liu

Shandong University

27 Shanda Nanlu

South Rd.

Jinan, SD 250100

China

  • Shandong University

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The Evolution Law of Femtosecond Laser Induced Periodic Structure on Monocrystalline Silicon with Scanning Rate and its Formation Mechanism

Number of pages: 19 Posted: 07 Mar 2024
Xuefei Liu, Chuanzhen Huang, Hanlian Liu, Dun Liu, Peng Yao, Bin Zou, Hongtao Zhu, Zhen Wang, Longhua Xu and Shuiquan Huang
Shandong University, Yanshan University, Shandong University, Shandong University, Shandong University, Shandong University, Shandong University, Yanshan University, Yanshan University and Yanshan University
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Abstract:

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femtosecond laser, Monocrystalline silicon, Laser-induced periodic surface structure (LIPSS), Silicon grains, Formation mechanism