Moscow
Russia
Lomonosov Moscow State University
Catalytic sensor, hydrogen, microheater, simulation, anodic aluminium oxide, Sensitivity
Catalytic sensor, hydrogen, microheater, simulation, anodic aluminium oxide, sensitivity.
anodic aluminum oxide, Photolithography, Wet etching, High aspect ratio patterning, Sacrificial layer, microheater
anodic aluminium oxide, phosphonic acid, hexagonal arrangement, activation energy, annealing
anodic aluminium oxide, kinetics, two-step anodizing, phosphoric acid, electrochemical pre-patterning