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Vadim A. Derbenev

Lomonosov Moscow State University

27/4 Lomonosovskij prospekt

Moscow, 119991

Russia

  • Lomonosov Moscow State University

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Scholarly Papers (1)

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Precise Patterning of Porous Anodic Aluminum Oxide by Photolithography and Wet Etching

Number of pages: 25 Posted: 06 Jan 2026
Vadim A. Derbenev, Ivan Alexandrovich Kalinin, Ilya Vladimirovich Roslyakov, Georgii A. Pleshakov, Irina V. Kolesnik, Ilya I. Tsiniaikin and Kirill Sergeevich Napolskii
Lomonosov Moscow State University, Lomonosov Moscow State University, Lomonosov Moscow State University, Lomonosov Moscow State University, Lomonosov Moscow State University, Lomonosov Moscow State University and Lomonosov Moscow State University
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Abstract:

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anodic aluminum oxide, Photolithography, Wet etching, High aspect ratio patterning, Sacrificial layer, microheater