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Thi-Thuy-Nga Nguyen

Nagoya University

Furo-cho, Chikusa-ku

Nagoya-City , 4648601

Japan

  • Nagoya University

SCHOLARLY PAPERS

2

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155

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1

Scholarly Papers (2)

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1.

An Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated Sin Films Using Hf/H2 and Cf4/H2 Plasmas

Number of pages: 32 Posted: 16 Aug 2023
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Makoto Sekine and Masaru Hori
Nagoya University, Nagoya University, Nagoya University, Nagoya University and Nagoya University
Downloads 110 (640,165)
Citation 1

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PECVD SiN film, CF4/H2 plasma, HF/H2 plasma, surface hydrogenation, ammonia fluorosilicate

2.

Nitrogen Admixture Effects on Growth Characteristics and Properties of Carbon Nanowalls

Number of pages: 22 Posted: 19 Oct 2023
Dennis Christy, Ngo Van Nong, Nikolay Britun, Ngo Quang Minh, Thi-Thuy-Nga Nguyen, Hiroki Kondo, Osamu Oda, Kenji Ishikawa and Masaru Hori
affiliation not provided to SSRN, affiliation not provided to SSRN, Nagoya University, affiliation not provided to SSRN, Nagoya University, affiliation not provided to SSRN, affiliation not provided to SSRN, Nagoya University and Nagoya University
Downloads 45 (1,121,190)

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Carbon nanowalls, RI-PECVD, Wettability, Nitrogen-doped carbon nanowalls, Curly-like carbon nanowalls