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Masaru Hori

Nagoya University

SCHOLARLY PAPERS

4

DOWNLOADS

246

TOTAL CITATIONS

2

Scholarly Papers (4)

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1.

An Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated Sin Films Using Hf/H2 and Cf4/H2 Plasmas

Number of pages: 32 Posted: 16 Aug 2023
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Makoto Sekine and Masaru Hori
Nagoya University, Nagoya University, Nagoya University, Nagoya University and Nagoya University
Downloads 110 (640,165)
Citation 1

Abstract:

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PECVD SiN film, CF4/H2 plasma, HF/H2 plasma, surface hydrogenation, ammonia fluorosilicate

2.

Mechanical Properties of Maze-Like Carbon Nanowalls Synthesized by the Radial Injection Plasma Enhanced Chemical Vapor Deposition Method

Number of pages: 22 Posted: 03 Aug 2022
Swapnil Ghodke, Ngo Van Nong, Motoyuki Murashima, Dennis Christy, Kenji Ishikawa, Osamu Oda, Noritsugu Umehara and Masaru Hori
affiliation not provided to SSRN, affiliation not provided to SSRN, Tohoku University, affiliation not provided to SSRN, Nagoya University, affiliation not provided to SSRN, Nagoya University and Nagoya University
Downloads 46 (1,109,210)
Citation 1

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carbon nanowalls, plasma-enhanced chemical vapor deposition, nanoindentation, mechanical properties, deformation mechanism

3.

Radical Enhanced Growth of Gan on Si with the Buffer Layer of Gan at a Low Temperature of 600 O C

Number of pages: 19 Posted: 25 Sep 2024
Swathy Jayaprasad, Arun kumar Dhasiyan, Naohiro Shimizu, Osamu Oda, Hiromasa Tanaka and Masaru Hori
Nagoya University, Nagoya University, Nagoya University, Nagoya University, Nagoya University and Nagoya University
Downloads 45 (1,133,231)

Abstract:

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GaN, Si (111) substrate, Radical enhanced MOCVD, LT-GaN buffer layer, N-terminated Si.

4.

Nitrogen Admixture Effects on Growth Characteristics and Properties of Carbon Nanowalls

Number of pages: 22 Posted: 19 Oct 2023
Dennis Christy, Ngo Van Nong, Nikolay Britun, Ngo Quang Minh, Thi-Thuy-Nga Nguyen, Hiroki Kondo, Osamu Oda, Kenji Ishikawa and Masaru Hori
affiliation not provided to SSRN, affiliation not provided to SSRN, Nagoya University, affiliation not provided to SSRN, Nagoya University, affiliation not provided to SSRN, affiliation not provided to SSRN, Nagoya University and Nagoya University
Downloads 45 (1,121,190)

Abstract:

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Carbon nanowalls, RI-PECVD, Wettability, Nitrogen-doped carbon nanowalls, Curly-like carbon nanowalls