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Rong Yi

Southern University of Science and Technology

No 1088, xueyuan Rd.

Xili, Nanshan District

Shenzhen, 518055

China

  • Southern University of Science and Technology

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Scholarly Papers (1)

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Mechanism Study of Plasma-Based Atom-Selective Etching of Si from the Perspective of Etching Mode

Number of pages: 62 Posted: 10 Aug 2023
Hui Deng, Bing Wu, Rong Yi and Linfeng Zhang
Southern University of Science and Technology, Southern University of Science and Technology, Southern University of Science and Technology and Southern University of Science and Technology
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Abstract:

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Atom-selective etching, Atomic and close-to-atomic scale manufacturing, Etching mode, Roughness, Single-crystal silicon