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Richard J. H. Morris

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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100

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0

Scholarly Papers (2)

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1.

Elastic Backscattering During Boron Implantation in Si1-Xge X

Number of pages: 13 Posted: 04 Sep 2023
Quan Bai, Masoud Dialameh, Richard J. H. Morris, Ian Vickridge, André Vantomme and Johan Meersschaut
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Sorbonne University, KU Leuven and Imec, Kapeldreef 75
Downloads 61 (951,658)

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boron implantation, backscattering, Si1-xGex, NRA, boron retention factor

2.

Quantification of boron in a SiGe epilayer using ion beam analysis

Number of pages: 20 Posted: 14 Oct 2025
Quan Bai, Masoud Dialameh, Anna H. Chakkunny, Richard J. H. Morris, Clément Porret, André Vantomme and Johan Meersschaut
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, KU Leuven and Imec, Kapeldreef 75
Downloads 39 (1,222,651)

Abstract:

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Boron, substrate-less RBS, NRA, SIMS, reference, SiGe