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Olf Pätzold

Institute of Nonferrous Metallurgy and Purest Materials

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Growth and Impact of Intrinsic Interlayers in High Temperature Vapor Phase Epitaxy of GaN

Number of pages: 17 Posted: 24 Oct 2023
Maik Förste, Tom Schneider, Peter D.B. Fischer, Christian Röder, Olf Pätzold, David Rafaja and Alexandros Charitos
Institute of Nonferrous Metallurgy and Purest Materials, Institute of Nonferrous Metallurgy and Purest Materials, Technical University Bergakademie Freiberg, Technical University Bergakademie Freiberg, Institute of Nonferrous Metallurgy and Purest Materials, Technical University Bergakademie Freiberg and Institute of Nonferrous Metallurgy and Purest Materials
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A1 Dislocation density, A1 Residual stress, A1 Surface morphology, A3 Vapor phase epitaxy, B1 Gallium nitride