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Zixuan Xue
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
The Effect of Rtp Pretreatment on Slip-Lines Of Argon Annealed Silicon Wafer
Number of pages: 10
Posted: 21 Oct 2023
Guifeng Chen
,
Chenguang Sun
,
Hu Wang
,
Xingtian Ai
,
Hui Zhang
, Zixuan Xue and
Xinjian Xie
Hebei University of Technology, Hebei University of Technology,
affiliation not provided to SSRN
, Hebei University of Technology, Hebei University of Technology,
affiliation not provided to SSRN
and Hebei University of Technology
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Abstract:
Argon annealing, RTP, Slip-lines, OISF, BMD, Silicon wafer
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