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Xiang Zhou

Kunming University of Science and Technology

Kunming Yunnan China

Kunming

China

SCHOLARLY PAPERS

2

DOWNLOADS

111

TOTAL CITATIONS

2

Scholarly Papers (2)

Effect of Heater Structure on Oxygen Concentration in Large Diameter N-Type Czochralski Silicon Study Using Numerical Simulation

Number of pages: 21 Posted: 06 Jan 2024
Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology - The National Engineering Laboratory for Vacuum Metallurgy, Kunming University of Science and Technology, Kunming University of Science and Technology and Kunming University of Science and Technology
Downloads 53 (1,083,731)
Citation 2

Abstract:

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heat transfer, Computer simulation, Oxygen concentration, Czochralski method

Effect of Heater Structure on Oxygen Concentration in Large Diameter N-Type Czochralski Silicon Study Using Numerical Simulation

Number of pages: 18 Posted: 24 Oct 2023
Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology - The National Engineering Laboratory for Vacuum Metallurgy, Kunming University of Science and Technology, Kunming University of Science and Technology and Kunming University of Science and Technology
Downloads 34 (1,296,409)

Abstract:

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A1. Heat transfer, A1. Computer simulation, A1. Oxygen concentration, A2. Czochralski method

2.

Argon-Induced Thermal Field Optimization and Oxygen Volatilization for Vacancy-Oxygen Defect Control in Cz Silicon Growth

Number of pages: 41 Posted: 18 Jun 2025
Kunming University of Science and Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, Kunming University of Science and Technology, affiliation not provided to SSRN and Kunming University of Science and Technology - The National Engineering Laboratory for Vacuum Metallurgy
Downloads 24 (1,411,822)

Abstract:

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Keywods:Argon flow rate, Vacancy-oxygen complexes, Czochralski (CZ) method, SiO/CO volatiles, Gas-phase mass transport