Sen Yu

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

  • Beijing Institute of Technology

SCHOLARLY PAPERS

2

DOWNLOADS

85

TOTAL CITATIONS

0

Scholarly Papers (2)

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1.

High-Precision and High-Speed Surface Topography Measurement of Microstructures Based on Laser Scanning Transverse Differential Confocal

Number of pages: 18 Posted: 27 Oct 2023
Sen Yu, Zhenru Wang, Lirong Qiu, Qidai Chen and Weiqian Zhao
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Jilin University (JLU) and Beijing Institute of Technology
Downloads 44 (913,720)

Abstract:

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optical measurement, surface topography, Anti-scattering, High-speed, High-precision, Transverse differential confocal

2.

High-Speed and Large-Range Laser Differential Confocal Microscopy Based on Galvanometer and Displacement Stage

Number of pages: 14 Posted: 13 Apr 2024
Sen Yu, Zhenru Wang, Weiqian Zhao and Lirong Qiu
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 41 (941,483)

Abstract:

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Optical measurement, Semiconductor Manufacturing, Surface topography, High-speed, Large-range, Laser differential confocal