default author photo

Weiqian Zhao

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

SCHOLARLY PAPERS

13

DOWNLOADS

468

TOTAL CITATIONS

0

Scholarly Papers (13)

1.

High-Speed and Large-Range Laser Differential Confocal Microscopy Based on Galvanometer and Displacement Stage

Number of pages: 14 Posted: 13 Apr 2024
Sen Yu, Zhenru Wang, Weiqian Zhao and Lirong Qiu
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 69 (883,195)

Abstract:

Loading...

Optical measurement, Semiconductor Manufacturing, Surface topography, High-speed, Large-range, Laser differential confocal

2.

B-Spline Adaptive Sampling Method for Freeform Surface Measurement Using Laser Differential Confocal Technology

Number of pages: 17 Posted: 29 Mar 2024
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 69 (883,195)

Abstract:

Loading...

B-spline, Adaptive sampling, laser differential confocal, Freeform Surface

3.

High-Precision and High-Speed Surface Topography Measurement of Microstructures Based on Laser Scanning Transverse Differential Confocal

Number of pages: 18 Posted: 27 Oct 2023
Sen Yu, Zhenru Wang, Lirong Qiu, Qidai Chen and Weiqian Zhao
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Jilin University (JLU) and Beijing Institute of Technology
Downloads 60 (961,006)

Abstract:

Loading...

optical measurement, surface topography, Anti-scattering, High-speed, High-precision, Transverse differential confocal

4.

Efficient Fabrication of High-Quality Quartz Pendulous Via Femtosecond Laser Bessel Beams Writing-Enhanced Wet Etching

Number of pages: 28 Posted: 21 Feb 2025
Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 46 (1,133,231)

Abstract:

Loading...

Quartz pendulous, Femtosecond laser, Bessel beam, Roughness, Residual stress

5.

Free-Form Measurement Method Based on Differential Confocal Sensing and Ccd Image

Number of pages: 18 Posted: 06 Jan 2024
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 44 (1,145,425)

Abstract:

Loading...

Differential confocal sensing, CCD image technology, High precision, Large range.

6.

Research on Laser Differential Confocal Axicon Surface Profile Measurement Method

Number of pages: 15 Posted: 30 Jan 2024
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 41 (1,170,409)

Abstract:

Loading...

Laser differential confocal, Normal tracking, Axicon, Profile measurement

7.

Adaptive-Tracking Laser Differential Confocal Freeform Surface Measurement with High Accuracy

Number of pages: 14 Posted: 22 Dec 2023
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 34 (1,263,436)

Abstract:

Loading...

laser differential confocal, adaptive-tracking, freeform surface, normal tracking

8.

Laser Differential Confocal Interference Surface Automatic Measurement Method

Number of pages: 9 Posted: 02 Dec 2023
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 30 (1,318,317)

Abstract:

Loading...

Phase-shift interference, Differential confocal, Posture adjustment, Zernike fitting, Automatic measurement

9.

A Confocal Measurement Method for Surface Profile Variations and Shell Thickness Uniformity of Hemispherical Shell Resonator

Number of pages: 19 Posted: 17 Nov 2023
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, affiliation not provided to SSRN and Beijing Institute of Technology
Downloads 26 (1,372,601)

Abstract:

Loading...

Hemispherical shell resonator, Unilateral-shift-subtracting confocal technique, Inside and outside surface profile variations, Thickness uniformity.

10.

High-Precision Phase-Shift Method for Heavy-Load Reference Mirror Based on Capacitance Sensor Monitoring

Number of pages: 15 Posted: 30 Aug 2023
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 23 (1,424,331)

Abstract:

Loading...

Large-aperture interferometry, Mechanical phase shifting, Surface profile, Nano-precision

11.

Model Reference Adaptive Control-Based Differential Confocal Global Subaperture Concentric-spherical Automatic Stitching Measurement Method

Number of pages: 38 Posted: 11 Mar 2026
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 15 (1,500,778)

Abstract:

Loading...

Non-full Spherical Surfaces, Laser Differential Confocal, Model Reference Adaptive Control, Global Subaperture Measurements, Concentric-spherical Automatic Stitching

12.

Highly stable dual-galvanometer mirror remote Spatial Offset Raman Spectroscopy detection method

Number of pages: 25 Posted: 29 May 2026
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 7 (1,566,597)

Abstract:

Loading...

Spatial Offset Raman Spectroscopy, Anisotropic materials, Dual-galvanometer mirror ring scanning, Detecting stability

13.

Highly stability dual-galvanometer mirror remote Spatial Offset Raman Spectroscopy detection method

Number of pages: 24 Posted: 08 Apr 2026
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 4 (1,579,934)

Abstract:

Loading...

remote SORS, anisotropic material, dual-galvanometer mirror ring scanning, detection stability