5 South Zhongguancun street
Center for Energy and Environmental Policy Researc
Beijing, 100081
China
Beijing Institute of Technology
Optical measurement, Semiconductor Manufacturing, Surface topography, High-speed, Large-range, Laser differential confocal
B-spline, Adaptive sampling, laser differential confocal, Freeform Surface
optical measurement, surface topography, Anti-scattering, High-speed, High-precision, Transverse differential confocal
Quartz pendulous, Femtosecond laser, Bessel beam, Roughness, Residual stress
Differential confocal sensing, CCD image technology, High precision, Large range.
Laser differential confocal, Normal tracking, Axicon, Profile measurement
laser differential confocal, adaptive-tracking, freeform surface, normal tracking
Phase-shift interference, Differential confocal, Posture adjustment, Zernike fitting, Automatic measurement
Hemispherical shell resonator, Unilateral-shift-subtracting confocal technique, Inside and outside surface profile variations, Thickness uniformity.
Large-aperture interferometry, Mechanical phase shifting, Surface profile, Nano-precision
Non-full Spherical Surfaces, Laser Differential Confocal, Model Reference Adaptive Control, Global Subaperture Measurements, Concentric-spherical Automatic Stitching
Spatial Offset Raman Spectroscopy, Anisotropic materials, Dual-galvanometer mirror ring scanning, Detecting stability
remote SORS, anisotropic material, dual-galvanometer mirror ring scanning, detection stability