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Weifeng Ma

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

  • Beijing Institute of Technology

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Scholarly Papers (1)

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Efficient Fabrication of High-Quality Quartz Pendulous Via Femtosecond Laser Bessel Beams Writing-Enhanced Wet Etching

Number of pages: 28 Posted: 21 Feb 2025
Weifeng Ma, Xiangtao Yu, Ruishi Wang, Feng Tian, Zan Tang, Zongquan Zhang, Lirong Qiu, Kejun Shang, Kemi Xu and Weiqian Zhao
Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, affiliation not provided to SSRN, Beijing Institute of Technology and Beijing Institute of Technology
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Abstract:

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Quartz pendulous, Femtosecond laser, Bessel beam, Roughness, Residual stress