5 South Zhongguancun street
Center for Energy and Environmental Policy Researc
Beijing, 100081
China
Beijing Institute of Technology
Differential confocal sensing, CCD image technology, High precision, Large range.
Hemispherical shell resonator, Unilateral-shift-subtracting confocal technique, Inside and outside surface profile variations, Thickness uniformity.
differential confocal detection, dynamic angle measurement, zero-crossing targeting, circular grating