Huimin Chen

Shanghai University

149 Yanchang Road

SHANGDA ROAD 99

Shanghai 200072, 200444

China

SCHOLARLY PAPERS

2

DOWNLOADS

138

TOTAL CITATIONS

0

Scholarly Papers (2)

1.

Impact of Thickness in Ultra-Thin Ald-Processed Hfo2 Gate Dielectric on the Performance of Low-Operating Voltage Thin-Film Transistors

Number of pages: 23 Posted: 22 Jan 2024
Shanghai University, Shanghai University, ALBA Synchrotron, University of Vigo, Chinese Academy of Sciences (CAS) - Shanghai Advanced Research Institute, Shanghai University, Shanxi Datong University, Shanghai University and European Synchrotron Radiation Facility (ESRF)
Downloads 104 (557,647)

Abstract:

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HfO2 thin films, x-ray scattering, Atomic layer deposition, Thin film transistors

2.

Impact of Thickness in Ultra-Thin Atomic-Layer-Deposition-Processed Hfo2 Gate Dielectric on the Performance of Low-Operating Voltage Thin-Film Transistors

Number of pages: 24 Posted: 31 Aug 2024
Shanghai University, Shanghai University, ALBA Synchrotron, University of Vigo, Chinese Academy of Sciences (CAS) - Shanghai Advanced Research Institute, Shanghai University, Shanxi Datong University, Shanghai University and European Synchrotron Radiation Facility (ESRF)
Downloads 34 (985,818)

Abstract:

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HfO2 thin films, x-ray scattering, Atomic layer deposition, Thin film transistors