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Shengsheng Liu

Taiyuan University of Science and Technology

China

  • Taiyuan University of Science and Technology

SCHOLARLY PAPERS

4

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114

TOTAL CITATIONS

0

Scholarly Papers (4)

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1.

Environmentally Friendly Slurry of Using Ceo2/Mos2 Mixed Abrasives in Quartz Glass Chemical Mechanical Polishing

Number of pages: 25 Posted: 04 Feb 2024
Gong Lv, Shengsheng Liu, Yuxi Cao, Yufei Zhang, Tong Liu, Zefang Zhang, Xufeng Li and Kaiyue Wang
Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology and Taiyuan University of Science and Technology
Downloads 39 (1,196,171)

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Quartz glass, CeO2, MoS2, Chemical mechanical polishing, Potassium oleate

2.

Effect of Synergistic Ceo2/Mos2 Abrasives on Surface Roughness and Material Removal Rate Of Quartz Glass

Number of pages: 25 Posted: 19 Apr 2024
Gong Lv, Shengsheng Liu, Yuxi Cao, Yufei Zhang, Tong Liu, Zefang Zhang, Xufeng Li and Kaiyue Wang
Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology and Taiyuan University of Science and Technology
Downloads 36 (1,236,159)

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Quartz glass, CeO2, MoS2, Chemical mechanical polishing, Potassium oleate

3.

Cmp of Silicon Substrates Via H-Bn/Sio2 Slurry Enabled by Synergistic Superlubrication and Shear Effects

Number of pages: 26 Posted: 15 Apr 2025
Shengsheng Liu, Tong Liu, Yuxi Cao, Gong Lv, Congcong Zhu and Kaiyue Wang
Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology and Taiyuan University of Science and Technology
Downloads 21 (1,436,435)

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silicon substrates, Chemical mechanical polishing, h-BN, SiO2, superlubricant

4.

Green Chemical Mechanical Polishing of Sapphire Wafers Utilizing H-Bn Assisted Al2o3 Abrasives

Number of pages: 33 Posted: 12 Aug 2025
Yuxi Cao, Tong Liu, Shengsheng Liu, Gong Lv, Chenyu Wang, Wangyang Li, Congcong Zhu and Kaiyue Wang
Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology and Taiyuan University of Science and Technology
Downloads 18 (1,470,786)

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Chemical mechanical polishing, Sapphire, Sorbitol, Aminomethyl propanol, h-BN