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Chenyu Wang

Taiyuan University of Science and Technology

China

  • Taiyuan University of Science and Technology

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Green Chemical Mechanical Polishing of Sapphire Wafers Utilizing H-Bn Assisted Al2o3 Abrasives

Number of pages: 33 Posted: 12 Aug 2025
Yuxi Cao, Tong Liu, Shengsheng Liu, Gong Lv, Chenyu Wang, Wangyang Li, Congcong Zhu and Kaiyue Wang
Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology, Taiyuan University of Science and Technology and Taiyuan University of Science and Technology
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Abstract:

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Chemical mechanical polishing, Sapphire, Sorbitol, Aminomethyl propanol, h-BN