affiliation not provided to SSRN
magnetron sputtering, aluminum nitride thin film, preparation process, finite element method, FBAR devices
Magnetron Sputtering, aluminum nitride thin film, preparation process, finite element method, FBAR devices
AlN, CFD, MNVPE, Porous media, Rotation
Li-ion batteries, Na-ion batteries, anode materials, AlB2 monolayer, Ultrahigh storage capacity
AlInGaN/GaN, Leakage Mechanisms, MIS capacitor, electrode geometry, interface passivation
Terahertz quantum cascade laser, Quasi-bound states in the continuum, Heterodyne detection, Local oscillator