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Hui Zhang

Hebei University of Technology

Tianjin

China

  • Hebei University of Technology

SCHOLARLY PAPERS

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Simulation and Preparation of Fbars Based on Aln Thin Films

Downloads 92 (736,406)
Citation 1

Simulation and Preparation of Fbars Based on Aln Thin Films

Number of pages: 25 Posted: 22 Jun 2024
Guifeng Chen, Hongfei Qi, Hui Zhang, Yi Fang, Xinjian Xie, Nan Gao, Yulong Fang and Li-Feng Bian
Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN and Fudan University
Downloads 53 (1,049,673)
Citation 1

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magnetron sputtering, aluminum nitride thin film, preparation process, finite element method, FBAR devices

Simulation and Preparation of Fbars Based on Aln Thin Films

Number of pages: 25 Posted: 18 Jun 2024
Guifeng Chen, Hongfei Qi, Hui Zhang, Nan Gao, Yi Fang, Xinjian Xie, Li-Feng Bian and Yulong Fang
Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, affiliation not provided to SSRN, Hebei University of Technology, Hebei University of Technology, Fudan University and affiliation not provided to SSRN
Downloads 39 (1,238,337)

Abstract:

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Magnetron Sputtering, aluminum nitride thin film, preparation process, finite element method, FBAR devices