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Igor Gornushkin

Helmholtz Association of German Research Centres - BAM Federal Institute for Materials Research and Testing

Berlin Office

Anna-Louisa-Karsch-Straße 2

Berlin, DE 10178

Germany

  • Helmholtz Association of German Research Centres - BAM Federal Institute for Materials Research and Testing

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Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in Rf-Arc Discharge

Number of pages: 16 Posted: 28 Mar 2024
Igor Gornushkin, Roman Kornev, Lubov Shabarova, Artur Ermakov, Georgiy Mochalov, Nikita Rekunov and Alexandra Kalinina
Helmholtz Association of German Research Centres - BAM Federal Institute for Materials Research and Testing, G.G. Devyatykh Institute of Chemistry of High-Purity Substances, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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RF-arc discharge, hydrogen reduction, silicon chloride, germanium chloride, thermodynamic, silicon, germanium