default author photo

Lubov Shabarova

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

28

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in Rf-Arc Discharge

Number of pages: 16 Posted: 28 Mar 2024
Igor Gornushkin, Roman Kornev, Lubov Shabarova, Artur Ermakov, Georgiy Mochalov, Nikita Rekunov and Alexandra Kalinina
Helmholtz Association of German Research Centres - BAM Federal Institute for Materials Research and Testing, G.G. Devyatykh Institute of Chemistry of High-Purity Substances, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 28 (1,372,601)

Abstract:

Loading...

RF-arc discharge, hydrogen reduction, silicon chloride, germanium chloride, thermodynamic, silicon, germanium