Peng Chen

Huazhong University of Science and Technology

1037 Luoyu Rd

Wuhan, 430074

China

  • Huazhong University of Science and Technology

SCHOLARLY PAPERS

4

DOWNLOADS

133

TOTAL CITATIONS

0

Scholarly Papers (4)

Actions:
Email selected abstracts
1.

Monolithic Frequency Superposition Scandium-Doped Aluminum Nitride Based Piezoelectric Mems Speaker with User-Defined Boundary

Number of pages: 11 Posted: 08 Oct 2024
Hongbin Yu, Peng Chen, Tunan Lv, Yan Wang and Junning Zhang
Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology and Huazhong University of Science and Technology
Downloads 53 (836,898)

Abstract:

Loading...

Piezoelectric MEMS speaker, frequency superposition, Scandium-doped Aluminum Nitride (AlScN), triangular cantilever, boundary condition, sound pressure level (SPL)

2.

Alscn-Based Quasi-Static Multi-Degree-Of-Freedom Piezoelectric Mems Micromirror with Large Mirror Plate and High Fill Factor

Number of pages: 10 Posted: 20 Apr 2024
Junning Zhang, Yan Wang, Peng Chen, Tunan Lv and Hongbin Yu
Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology and Huazhong University of Science and Technology
Downloads 39 (959,088)

Abstract:

Loading...

Micromirror, microelectromechanical systems (MEMS), Quasi-static actuators, Piezoelectric, AlScN

3.

Quasi-Closed Diaphragm Based Piezoelectric Micromachined Ultrasonic Transducer with Reduced Q and Stress Sensitivity for In-Air Rangefinding

Number of pages: 19 Posted: 26 Aug 2024
Hongbin Yu, Yan Wang, Peng Chen and Junning Zhang
Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology and Huazhong University of Science and Technology
Downloads 24 (1,124,972)

Abstract:

Loading...

Piezoelectric Micromachined Ultrasonic Transducer, Rangefinder, Quality factor, Residual stress, quasi-closed, Time of flight

4.

Improving Wideband Performance for Scaln Based Piezoelectric Mems Speaker by Multi-Mode Excitation

Number of pages: 12 Posted: 04 Apr 2025
Hongbin Yu, Peng Chen, Yan Wang, Junning Zhang and Zihan Li
Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology, Huazhong University of Science and Technology and Huazhong University of Science and Technology
Downloads 17 (1,211,013)

Abstract:

Loading...

Piezoelectric MEMS speaker, Scandium-doped Aluminum Nitride (ScAlN), Wideband performance, Multi-mode excitation, Triangular cantilever beam, Electrode partition