Pavel Souček

Masaryk University

Zerotinovo nam. 9

60177 Brno, 603 00

Czech Republic

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Enhancement of Ionised Metal Flux Fraction Without Compromising Deposition Rate in Industrial Magnetron Sputtering

Number of pages: 11 Posted: 18 May 2024

Peter Klein, Jaroslav Hnilica, Matej Fekete, Petr Vašina, Pavel Souček and Vjačeslav Sochora

Masaryk University, Masaryk University, RWTH Aachen University, Masaryk University, Masaryk University and affiliation not provided to SSRN

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