Jaroslav Hnilica

Masaryk University

Zerotinovo nam. 9

60177 Brno, 603 00

Czech Republic

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SCHOLARLY PAPERS

4

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156

TOTAL CITATIONS

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Scholarly Papers (4)

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1.

On Direct-Current Magnetron Sputtering at Industrial Conditions with High Ionization Fraction of Sputtered Species

Number of pages: 20 Posted: 02 May 2024

Jaroslav Hnilica, Peter Klein, M. Učík, Stanislava Debnárová, J. Kluson and Petr Vašina

Masaryk University, Masaryk University, Masaryk University, Masaryk University, PLATIT a.s. and Masaryk University

Downloads 62 (951,658)

Abstract:

2.

Enhancement of Ionised Metal Flux Fraction Without Compromising Deposition Rate in Industrial Magnetron Sputtering

Number of pages: 11 Posted: 18 May 2024

Peter Klein, Jaroslav Hnilica, Matej Fekete, Petr Vašina, Pavel Souček and Vjačeslav Sochora

Masaryk University, Masaryk University, RWTH Aachen University, Masaryk University, Masaryk University and affiliation not provided to SSRN

Downloads 42 (1,157,785)

Citation 1

Abstract:

3.

Exploring Different Strategies of Multipulse Hipims

Number of pages: 17 Posted: 15 Oct 2024

Jaroslav Hnilica, Pavel Souček, Martin Ondryas, Peter Klein, Matej Fekete and Petr Vašina

Masaryk University, Masaryk University, Masaryk University, Masaryk University, RWTH Aachen University and Masaryk University

Downloads 31 (1,304,549)

Abstract:

4.

In-situ analysis of metal atom, metal ion and argon ion fluxes in industrial magnetron sputtering with Al, Cr and AlCr targets

Number of pages: 12 Posted: 09 Jan 2026

Peter Klein, Jaroslav Hnilica, Mojmır Jilek, Mayur Khan, Anna Macková and Petr Vašina

Masaryk University, Masaryk University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Masaryk University

Downloads 21 (1,436,435)

Abstract:

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