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Mayur Khan
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
In-situ analysis of metal atom, metal ion and argon ion fluxes in industrial magnetron sputtering with Al, Cr and AlCr targets
Number of pages: 12
Posted: 09 Jan 2026
Peter Klein
,
Jaroslav Hnilica
,
Mojmır Jilek
, Mayur Khan,
Anna Macková
and
Petr Vašina
Masaryk University, Masaryk University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
and Masaryk University
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Abstract:
magnetron sputtering, DCMS, Industry, Coatings, IMFF, QCM
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