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Can Li

Wuhan University

Wuhan University

Economics and Management School

Wuhan, Hubei 430072

China

SCHOLARLY PAPERS

1

DOWNLOADS

24

TOTAL CITATIONS

0

Scholarly Papers (1)

1.

Dependence of Frequency-Temperature Stability on Support Tethers in Dual-Beam Piezoresistive Sensing Mems Resonators

Number of pages: 19 Posted: 29 May 2024
Wuhan University, Wuhan University, Wuhan University and Wuhan University - Institute of Technological Sciences
Downloads 24 (1,399,036)

Abstract:

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MEMS resonator, Dual-beam, Support tether, Piezoresistive sensing, Frequency-temperature shift.