Underwater imaging, Piezoelectric micromachined ultrasonic transducers (PMUTs), Microelectromechanical systems(MEMS), Transceiver integrated, Scandium-doped aluminum nitride (ScAlN)
Vector hydrophone system, direction-of-arrival estimations, microelectromechanical systems (MEMS), piezoelectric micromachined ultrasonic transducers (PMUTs), acoustic pressure gradient.
Piezoelectric micromachined ultrasonic transducers (PMUTs), hexagonal transduction diaphragms, transmission sensitivity, quality factor (Q), volume displacement
Ladder-type MEMS filters, Narrowband, Thin-film piezoelectric on silicon, Channel selection, MEMS resonators
MEMS resonator, Dual-beam, Support tether, Piezoresistive sensing, Frequency-temperature shift.