Underwater imaging, Piezoelectric micromachined ultrasonic transducers (PMUTs), Microelectromechanical systems(MEMS), Transceiver integrated, Scandium-doped aluminum nitride (ScAlN)
AlN/ScAlN composite film, Temperature sensor, phase noise, Thermal Stability
Aluminum Nitride thin film, Metal-organic chemical vapor deposition, Compound mechanism, Crystal quality, Microstructure
MEMS, Piezoelectric Speaker, PZT, Bias voltage, Bandwidth
MEMS, Piezoelectric Speaker, PZT, Bias voltage, Bandwidth, frequency-selective phase-reversal circuit