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Zhiwei Wen

Wuhan University

Wuhan University

Economics and Management School

Wuhan, Hubei 430072

China

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Novel Aln/Scaln Composite Film Saw for Achieving Highly Sensitive Temperature Sensors

Number of pages: 12 Posted: 18 Sep 2024
Yan Liu, Yuanhang Qu, Xiang Chen, Sheng-Xiang Wang, Xiyu Gu, Min Wei, Xiaoming Huang, Zesheng Liu, Jiaqi Ding, Zhiwei Wen, Yao Cai, Shishang Guo and Chengliang Sun
Wuhan University, Wuhan University, Wuhan University, Wuhan Textile University, Wuhan University, Wuhan University, Wuhan University, Wuhan University, Wuhan University, Wuhan University, Wuhan University, Wuhan University and Wuhan University - Institute of Technological Sciences
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Abstract:

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AlN/ScAlN composite film, Temperature sensor, phase noise, Thermal Stability