Wuhan University
Economics and Management School
Wuhan, Hubei 430072
China
AlN/ScAlN composite film, Temperature sensor, phase noise, Thermal Stability
Aluminum Nitride thin film, Metal-organic chemical vapor deposition, Compound mechanism, Crystal quality, Microstructure
MEMS, Piezoelectric Speaker, PZT, Bias voltage, Bandwidth
MEMS, Piezoelectric Speaker, PZT, Bias voltage, Bandwidth, frequency-selective phase-reversal circuit